課程資訊
課程名稱
微奈米機電系統
Micro-electro-mechanical System & Nanotechnology 
開課學期
102-1 
授課對象
學程  光機電系統學程  
授課教師
黃榮山 
課號
AM7084 
課程識別碼
543EM5850 
班次
 
學分
全/半年
半年 
必/選修
選修 
上課時間
星期二3,4,@(10:20~) 
上課地點
應107 
備註
本課程以英語授課。
總人數上限:35人 
Ceiba 課程網頁
http://ceiba.ntu.edu.tw/1021MEMS 
課程簡介影片
 
核心能力關聯
核心能力與課程規劃關聯圖
課程大綱
為確保您我的權利,請尊重智慧財產權及不得非法影印
課程概述

The use of conventional semiconductor process and other microfabrication technologies to create miniaturized sensors, actuators, and structures has become increasingly accepted in many areas of science and engineering. This course is interdisciplinary nature of micromachining techniques and their applications. Use of these technologies has resulted in an unprecedented range of devices that can be employed in applications through either displacement of macroscopic competitors or by enabling functions that are impossible. In addition to the micro science and engineering lecture, the course will also provide lab project for simplified hands-on experiment to gain practical sense of micro world.  

課程目標
1. What is MEMS? Introduction to Microscopic World
2. Review of Standard VLSI Microfabrication, Processes in CMOS
3. Micromachining Process
4. Cleanroom visit
5. MEMS Fabrication Process I & II : bulk & Surface Micromachining:
6. Micro sensors: Physical and Chemical
7. Corporate visit or invited lecture (to be arranged)
8. Nano Technology:Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
9. Biosensors
 
課程要求
Project+Presentation: 5% + 10% + 25% = 40%
Q&A: 15 %
Final exam: 45%
 
預期每週課後學習時數
 
Office Hours
 
指定閱讀
 
參考書目
1. M. Madou, Foundamentals of Microfabrication, 1997 (CRC Press).
2. G.T.A. Kovacs, Micromachined Transducer Sourcebook, 1998S. D. Senturia, Microsystem Design, 2001 (Kluwer Academic publishers)莊達人, VLSI 製造技術, 1995 (高立圖書有限公司)
3. S.M. Sze, VLSI Technology, 2nd ed., 1988 (McGraw Hill).
4. 積體電路製程及設備技術手冊, 張俊彥主編, 1997.
5. R. Muller et. al., Microelectromechanical Systems: Advanced Materials &
Fabrication Methods, 1997 (National Academy Press).
6. Williams S. Trimmer (ed), Micromechanics and MEMS:
classic and seminal papers to 1990, 1996 (IEEE Press)
7. Charles P. Poole Jr., Frank J. Owens, Introduction to Nanotechnology, Wiley, 2003
8. T.-J. Chung, P.M. Anderson, M.-K. Wu, and S. Hsieh, Nanomechanics of
Materials and Structure, Springer, 2006
 
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
Week 1
9/10  Introduction of microsystem and its applications 
Week 2
9/17  Introduction of microsystem and its applications 
Week 3
9/24  Introduction of microsystem and its applications 
Week 4
10/05  Review of Standard VLSI Microfabrication, Processes in CMOS 
Week 5
10/1  Foundry process 
Week 6
10/8  Micromachining Process 
Week 7
10/15  Cleanroom field visit 
Week 8
10/22  MEMS Fabrication Process I & II : bulk & Surface Micromachining 
Week 9
10/29  MEMS Fabrication Process I & II : bulk & Surface Micromachining 
Week 10
11/5  MEMS Fabrication Process I & II : bulk & Surface Micromachining 
Week 11
11/12  Micro sensors: Physical and Chemical 
Week 12
11/19  Micro sensors: Physical and Chemical 
Week 13
11/26  Micro sensors: Physical and Chemical 
Week 14
12/3  Nano Technology:
Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
 
Week 15
12/10  Nano Technology:
Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
 
Week 16
12/17  Biosensor 
Week 17
12/24  Biosnesor